Synthesis of carbon barrier film using pulsed DC Closed Field Unbalanced Magnetron Sputtering
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Published:2009-11-14
Issue:5(1)
Volume:55
Page:1865-1868
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ISSN:0374-4884
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Container-title:Journal of the Korean Physical Society
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language:en
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Short-container-title:J. Korean Phy. Soc.
Publisher
Korean Physical Society
Subject
General Physics and Astronomy