Numerical Analysis on Particle Growth in Pulsed SiH4 Plasma Process by Discrete-Sectional Method
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Published:2008-04-15
Issue:9(4)
Volume:52
Page:1292-1297
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ISSN:0374-4884
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Container-title:Journal of the Korean Physical Society
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language:en
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Short-container-title:J. Korean Phy. Soc.
Author:
Kim Dong-Joo,Kim Kyo-Seon,Charinpanitkul Tawatchai,Kim Woo-Sik
Publisher
Korean Physical Society
Subject
General Physics and Astronomy