Development of a Two-dimensional Fluid Simulator for a SiH4 Discharge in Transformer Coupled Plasma Sources
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Published:2010-12-15
Issue:6(1)
Volume:57
Page:1919-1924
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ISSN:0374-4884
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Container-title:Journal of the Korean Physical Society
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language:en
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Short-container-title:J. Korean Phy. Soc.
Author:
Kwon Deuk-Chul,Lee Won-Gi,Yoon Nam-Sik
Publisher
Korean Physical Society
Subject
General Physics and Astronomy