Affiliation:
1. Scientific-Practical Materials Research Centre of the National Academy of Sciences of Belarus
2. Manchester University
Abstract
We present experimental results showing that the migration ability of interstitial carbon atom (Сi) in silicon depends noticeably on its charge state. The experimental results were obtained from the analysis of deep level transient spectra in n+–p diodes subjected to irradiation with 4–6 MeV electrons or α-particles at T < 273 k and subsequent heat-treatments in the temperature range 280–330 k under reverse bias and without it. It has been found that in the positive charge state the Сi migration energy is 0.88 ± 0.02 eV, while in the neutral charge state it is lowered down to 0.73–0.74 eV.
Publisher
Publishing House Belorusskaya Nauka
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