Affiliation:
1. A. N. Sevchenko Institute of Applied Physical Problems of the Belarusian State University
2. National Science Center Kharkov Institute of Physics and Technology
Abstract
Nanostructured TixCr1–xN coatings of various compositions 0.58 ≤ x ≤ 0.8 on the substrates made of AISI 304 stainless steel and monocrystalline silicon were formed by the method of separable vacuum-arc deposition. The elemental composition was studied by Rutherford backscattering spectrometry of helium ions. The structural-phase state and the morphology were examined by X-ray diffraction, optical and scanning electron microscopy, tribomechanical tests of the initial coatings were also carried out. The radiation tolerance of the nanostructured TixCr1–xN coatings within 0.58 ≤ x ≤ 0.8 under He+ ion irradiation with an energy of 500 keV in the fluence range of 5·1016–3·1017 ions/cm2 was studied for the first time. It was found that the TixCr1–xN coatings within 0.58 ≤ x ≤ 0.8 withstand irradiation without significant changes in the structure up to a fluence of 2·1017 ions/cm2, when a partial coating flaking (exfoliation) up to a depth of the projected range of helium ions takes place. A decrease in the average size of crystallites of coatings and the crystal lattice period reduction after radiation exposure were detected. The decrease in the microhardness of the TixCr1–xN coatings of all compositions after irradiation was found.
Publisher
Publishing House Belorusskaya Nauka