Hydrophobic and Mechanical Characteristics of Hydrogenated Amorphous Carbon Films Synthesized by Linear Ar/CH4 Microwave Plasma-Reference-Cited by-同舟云学术

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Hydrophobic and Mechanical Characteristics of Hydrogenated Amorphous Carbon Films Synthesized by Linear Ar/CH4 Microwave Plasma

Published:2017-03-31 Issue:2 Volume:26 Page:34-41
ISSN:2288-6559
Container-title:Applied Science and Convergence Technology
language:en
Short-container-title:Appl. Sci. Converg. Technol.

Author:

Han Moon-Ki¹,Kim Taehwan¹,Cha Ju-Hong¹,Kim Dong-Hyun¹,Lee Hae June¹,Lee Ho-Jun¹

Affiliation:

1. Department of Electrical and Computer Engineering, Pusan National University, Republic of Korea

Publisher

The Korean Vacuum Society

Subject

Electrical and Electronic Engineering,Physical and Theoretical Chemistry,Condensed Matter Physics,Materials Science (miscellaneous)

Link

http://ocean.kisti.re.kr/downfile/crosscheck/kvs/JAKO201714563377234.pdf

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