Modified Fluid Simulation of an Inductively Coupled Plasma Discharge
Author:
Affiliation:
1. School of Electronics and Information Engineering, Korea Aerospace University, Gyeonggu-do 10540, Republic of Korea
2. Plasma Technology Research Center, National Fusion Research Institute, Jeollabuk-do 54004, Republic of Korea
Publisher
The Korean Vacuum Society
Subject
Electrical and Electronic Engineering,Physical and Theoretical Chemistry,Condensed Matter Physics,Materials Science (miscellaneous)
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Power characteristics of multiple inductively coupled RF discharges inside a metallic chamber;Plasma Science and Technology;2021-11-25
2. Dual-Frequency Microwave Plasma Source Based on Microwave Coaxial Transmission Line;Applied Sciences;2021-10-22
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