Numerical Simulation: Effects of Gas Flow and Heat Transfer on Polymer Deposition in a Plasma Dry Etcher
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Published:2017-11-30
Issue:6
Volume:26
Page:184-188
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ISSN:2288-6559
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Container-title:Applied Science and Convergence Technology
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language:en
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Short-container-title:Appl. Sci. Converg. Technol.
Affiliation:
1. Department of Materials Science and Engineering, Kunsan National University, Gunsan, Jeonbuk 573-701, Korea
Publisher
The Korean Vacuum Society
Subject
Electrical and Electronic Engineering,Physical and Theoretical Chemistry,Condensed Matter Physics,Materials Science (miscellaneous)