Collisional Ion Energy Transfer Model for Understanding Wrinkles on Poly (dimethylsiloxane) Surfaces after Oxygen Ion Beam Irradiations-Reference-Cited by-同舟云学术

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Collisional Ion Energy Transfer Model for Understanding Wrinkles on Poly (dimethylsiloxane) Surfaces after Oxygen Ion Beam Irradiations

Published:2018-11-30 Issue:6 Volume:27 Page:130-134
ISSN:2288-6559
Container-title:Applied Science and Convergence Technology
language:en
Short-container-title:Appl. Sci. Converg. Technol.

Author:

Lee Seunghun¹,Yang Junyoung¹,Jung Sunghoon¹,Kim Do-Geun¹,Byeon Eunyeon¹

Affiliation:

1. Advanced Nano-Surface Department, Korea Institute of Materials Science, Gyeongsangnam-do 51510, Republic of Korea

Publisher

The Korean Vacuum Society

Subject

Electrical and Electronic Engineering,Physical and Theoretical Chemistry,Condensed Matter Physics,Materials Science (miscellaneous)

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Out-of-plane surface patterning by subsurface processing of polymer substrates with focused ion beams;Beilstein Journal of Nanotechnology;2020-11-06

2. Properties of tungsten thin film deposited using inductively coupled plasma assisted sputtering for next-generation interconnect metal;Thin Solid Films;2019-03

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