Optical Emission Spectra of Oxygen Plasma Produced by Radio-Frequency Plasma-Reference-Cited by-同舟云学术

Optical Emission Spectra of Oxygen Plasma Produced by Radio-Frequency Plasma

Published:2009-03-31 Issue:2 Volume:18 Page:102-107
ISSN:1225-8822
Container-title:Journal of the Korean Vacuum Society
language:en
Short-container-title:Journal of the Korean Vacuum Society

Author:

Kim Do-Yeob,Kim Min-Su,Kim Tae-Hoon,Kim Ghun-Sik,Choi Hyun-Young,Cho Min-Young,Jeon Su-Min,Park Sung-Dong,Kim Jin-Ha,Kim Eun-Do,Hwang Do-Weon,Lee Jae-Young

Publisher

The Korean Vacuum Society

Subject

Electrical and Electronic Engineering,Physical and Theoretical Chemistry,Condensed Matter Physics,Materials Science (miscellaneous)

Link

http://ocean.kisti.re.kr/downfile/crosscheck/kvs/JAKO200916256327112.pdf

Reference22 articles.

1. Plasma assisted molecular beam epitaxy of ZnO on c -plane sapphire: Growth and characterization

2. Influence of Zn/O flux ratio and Mn-doped ZnO buffer on the plasma-assisted molecular beam epitaxy of ZnO on c-plane sapphire

3. Growth Properties of Sputtered ZnO Thin Films Affected by Oxygen Partial Pressure Ratio

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