A Study on Beam Extraction Characteristics of RF and DC Filament Ion Source for High Current Ion Implanters-Reference-Cited by-同舟云学术

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A Study on Beam Extraction Characteristics of RF and DC Filament Ion Source for High Current Ion Implanters

Published:2021-05-31 Issue:3 Volume:30 Page:92-94
ISSN:2288-6559
Container-title:Applied Science and Convergence Technology
language:en
Short-container-title:Appl. Sci. Converg. Technol.

Author:

Cha Ju-Hong¹,Kim Sang-Woo¹,Lee Ho-Jun¹

Affiliation:

1. Department of Electrical Engineering, Pusan National University, Busan 46241, Republic of Korea

Funder

Korea Institute for Advancement of Technology

Publisher

The Korean Vacuum Society

Subject

Electrical and Electronic Engineering,Physical and Theoretical Chemistry,Condensed Matter Physics,Materials Science (miscellaneous)

Link

http://pdf.medrang.co.kr/ASCT/2021/030/ASCT030-03-06.pdf

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Development and Evaluation of Ferrite Core Inductively Coupled Plasma Radio Frequency Ion Source for High-Current Ion Implanters in Semiconductor Applications;Sensors;2024-08-05

2. A Study Using Crystal Transport of Ions in Matter When Boron Ion is Implanted into a Tungsten Trioxide Thin Film;Applied Science and Convergence Technology;2024-05-30

3. Machine Learning-Based Approach for Automatic Ion Implanter Monitoring;2022 International Automatic Control Conference (CACS);2022-11-03

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