Reliability Measurements and Thermal Stabilities of W-C-N Thin Films Using Nanoindenter-Reference-Cited by-同舟云学术

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Reliability Measurements and Thermal Stabilities of W-C-N Thin Films Using Nanoindenter

Published:2011-05-30 Issue:3 Volume:20 Page:200-204
ISSN:1225-8822
Container-title:Journal of the Korean Vacuum Society
language:en
Short-container-title:Journal of the Korean Vacuum Society

Author:

Kim Joo-Young,Oh Hwan-Won,Kim Soo-In,Choi Sung-Ho,Lee Chang-Woo

Publisher

The Korean Vacuum Society

Subject

Electrical and Electronic Engineering,Physical and Theoretical Chemistry,Condensed Matter Physics,Materials Science (miscellaneous)

Link

http://ocean.kisti.re.kr/downfile/crosscheck/kvs/JAKO201118861576854.pdf

Reference7 articles.

1. Characteristics and Physical Property of Tungsten(W) Related Diffusion Barrier Added Impurities

2. Physical Properties of a HDI-PR after Dipping It in a Plasma-inducedLiquid-vapor-activated (PLVA) PR Stripper As Measured by UsingNano-indentation

3. The relation between load and penetration in the axisymmetric boussinesq problem for a punch of arbitrary profile

4. A method for interpreting the data from depth-sensing indentation instruments

5. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Study of Tungsten Nitride Diffusion Barrier for Various Nitrogen Gas Flow Rate by Employing Nano-Mechanical Analysis;Journal of the Korean Vacuum Society;2013-07-30

2. Nano-mechanical Properties of Nanocrystal of HfO2Thin Films for Various Oxygen Gas Flows and Annealing Temperatures;Journal of the Korean Vacuum Society;2012-09-30

3. Nano-size Study of Surface-modified Ag Anode for OLEDs;Journal of the Korean Vacuum Society;2012-01-30

4. Surface Physical Properties of W-N Nano Thin Films by Nanotribological Analysis;Journal of the Korean Vacuum Society;2011-11-30

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