1. Semiconductor Integrated Metrology Team, Korea Research Institute of Standards and Science, Daejeon 34113, Republic of Korea
2. Department of Physics, Chungnam National University, Daejeon 34134, Republic of Korea
3. School of Electronics and Information Engineering, Korea Aerospace University, Goyang 10540, Republic of Korea
4. Department of Semiconductor Science, Engineering and Technology, Korea Aerospace University, Goyang 10540, Republic of Korea