Fluorine Plasma Corrosion Resistance of Anodic Oxide Film Depending on Electrolyte Temperature
Author:
Affiliation:
1. DaeJeon University, Daejeon 34520, Republic of Korea
2. Korea Research Institute of Standards and Science, Daejeon 34113, Republic of Korea
3. University of Science and Technology, Daejeon 34113, Republic of Korea
Publisher
The Korean Vacuum Society
Subject
Electrical and Electronic Engineering,Physical and Theoretical Chemistry,Condensed Matter Physics,Materials Science (miscellaneous)
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