Highly-uniform resonator-based visible spectrometer on a Si3N4 platform with robust and accurate post-fabrication trimming
Author:
Funder
Air Force Office of Scientific Research (AFOSR)
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference28 articles.
1. High quality planar silicon nitride microdisk resonators for integrated photonics in the visible wavelength range
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