Large-scale fabrication of an ultrathin broadband absorber using quasi-random dielectric Mie resonators

Author:

Guo Xudong12,Ren Yu-Xuan3ORCID,Li Li1,Wang Zihui1,Wang Shenzhi1,Gao Mingyan1,Wang Zuobin1,Wong Kenneth K. Y.24ORCID

Affiliation:

1. Changchun University of Science and Technology

2. The University of Hong Kong

3. Fudan University

4. Advanced Biomedical Instrumentation Centre

Abstract

Ultrathin broadband absorber maintaining a near-uniform low reflectivity over a broadband wavelength is essential for many optical applications, such as light harvesting and nanoscale imaging. Recently, there has been considerable interest in employing arrays of high-index dielectric Mie resonators on surfaces to trap light and reduce the reflectivity. For such Mie-resonant metasurfaces, however, antireflection properties featuring both a flat low reflectance curve and a wide bandwidth are hard to be satisfied simultaneously, and an efficient large-scale nanofabrication technique rarely exists. Here, we present a high-throughput laser interference induced quasi-random patterning (LIIQP) technique to fabricate quasi-random Mie resonators in large scale. Mie resonators with feature sizes down to sub-100 nm have been fabricated using a 1064 nm laser source. Each Mie resonator concentrates light at its shape-dependent resonant frequency, and all such resonators are arranged quasi-randomly to provide both rich (with broadband Fourier components) and strong (with large intensities) Fourier spectra. Specifically, a near-uniform broadband reflectivity over 400-1100 nm spectrum region has been confined below 3% by fabricating a large-scale ultrathin (around 400 nm) absorber. Our concept and high-throughput fabrication technique allows the rapid production of quasi-random dielectric Mie-resonant metasurfaces in a controllable way, which can be used in various promising applications including thin-film solar cells, display, and imaging.

Funder

National Key Research and Development Program of China

EU H2020 Program

National Natural Science Foundation of China

Jilin Provincial Science and Technology Program

111 Project

Research Grants Council of the Hong Kong Special Administrative Region of China

Publisher

Optica Publishing Group

Subject

Atomic and Molecular Physics, and Optics

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