Affiliation:
1. Beijing Institute of Technology
2. National Institute of Metrology
3. Beijing Institute of Technology
Abstract
Crystalline micro-resonators are attractive for a wide range of applications due to their extremely high quality (Q) factor. In this paper, we develop a semi-automatic method for fabricating ultra-high Q-factor MgF2 crystalline micro-resonators. By utilizing a force feedback sensor and corresponding control, we made a semi-automatic precision grind-and-polishing machine, and successfully fabricated trapezoid MgF2 resonators with diameter of 9.5 mm and a root mean square surface roughness of 0.26 nm. The maximum difference of peaks and valleys is about 1.5 nm. The Q-factor was characterized to be 9.24 × 109at 1550 nm by the cavity ring-down spectroscopy. A single soliton optical frequency comb was generated by pumping the microcavity with 150 mW optical power.
Funder
National Key Research and Development Program of China
National Natural Science Foundation of China
State Key Laboratory of Advanced Optical Communication Systems and Networks
Subject
Atomic and Molecular Physics, and Optics
Cited by
2 articles.
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