Fourier analysis for rotating-element ellipsometers
Author:
Funder
Center for Nanoscale Mechatronics & Manufacturing
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference4 articles.
1. Expanding horizons: new developments in ellipsometry and polarimetry
2. Waveform analysis with optical multichannel detectors: Applications for rapid‐scan spectroscopic ellipsometry
3. Error correction for calibration and data reduction in rotating-polarizer ellipsometry: applications to a novel multichannel ellipsometer
4. Regression calibration method for rotating element ellipsometers
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3. Quantification and reduction of Poisson-Gaussian mixed noise induced errors in ellipsometry;Optics Express;2021-08-05
4. Universal evaluation of combined standard uncertainty for rotating-element spectroscopic ellipsometers;Optics Express;2016-11-03
5. Studies of process measurement technology for manufacturing advanced nano devices;Vacuum Magazine;2015-09-30
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