Mid-infrared optical characterization of thin SiNx membranes-Reference-Cited by-同舟云学术

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Mid-infrared optical characterization of thin SiNx membranes

Published:2019-06-27 Issue:19 Volume:58 Page:5233
ISSN:1559-128X
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Stocchi M.^ORCID,Mencarelli D.,Pierantoni L.,Kot D.,Lisker M.,Göritz A.,Baristiran Kaynak C.,Wietstruck M.,Kaynak M.

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering

Reference19 articles.

1. Design of monocrystalline Si/SiGe multi-quantum well microbolometer detector for infrared imaging systems

2. CMOS-Integrated Si/SiGe Quantum-Well Infrared Microbolometer Focal Plane Arrays Manufactured With Very Large-Scale Heterogeneous 3-D Integration

3. (Invited) Si1-xGex/Si MQW Based Uncooled Microbolometer Development and Integration into 130 nm BiCMOS Technology

4. Sub-10-pW/Hz0.5Uncooled Micro-Bolometer With a Vacuum Micro-Package

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Deformations of Single-Crystal Silicon Circular Plate: Theory and Experiment;Symmetry;2024-01-23

2. Development of thermal emissivity calculation method for transmissive multilayer nanomembranes;International Conference on Extreme Ultraviolet Lithography 2023;2023-11-21

3. Compact thin film lithium niobate folded intensity modulator using a waveguide crossing;Optics Express;2022-03-04

4. Ultra-High Extinction Dual-Output Thin-Film Lithium Niobate Intensity Modulator;IEEE Access;2022

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