Augmenting performance of a MEMS cantilever-based photonic crystal waveguide for switching applications
Author:
Funder
Ministry of Electronics and Information technology
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering
Reference23 articles.
1. Wafer-Level Heterogeneous Integration for MOEMS, MEMS, and NEMS
2. Out-of-plane nano-electro-mechanical tuning of the Fano resonance in photonic crystal split-beam nanocavity
3. Photonic Crystal-Based MOEMS Devices
4. Photonic Crystal Nanobeam Cavities for Tunable Filter and Router Applications
5. Read-Out of Cantilever Bending With a Grated Waveguide Optical Cavity
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