Patterned wafer inspection using spatial filtering for the cluster environment
Author:
Publisher
The Optical Society
Reference20 articles.
1. Holographic Optical Processing For Submicrometer Defect Detection
2. Patterned wafer inspection using laser holography and spatial frequency filtering
3. Inspection of integrated circuit photomasks with intensity spatial filters
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1. Application of neural networks and genetic algorithms to the screening for high quality chips;Applied Soft Computing;2009-03
2. Clustered defect detection of high quality chips using self-supervised multilayer perceptron;Expert Systems with Applications;2007-11
3. Image processing techniques for wafer defect cluster identification;IEEE Design & Test of Computers;2002-03
4. Defect detection algorithm for wafer inspection based on laser scanning;IEEE Transactions on Semiconductor Manufacturing;1997
5. Recognition of damage in polarizing transmission-grating facets;Applied Optics;1996-02-10
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