Silicon nitride ridge-type optical waveguides fabricated on oxidized silicon by laser direct writing
Author:
Publisher
The Optical Society
Reference3 articles.
1. Single-step fabrication of ridge-type glass optical waveguides by laser chemical vapor deposition
2. Laser direct writing of channel waveguides using spin‐on polymers
3. Laser fabricated GaAs waveguiding structures
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1. Subpicosecond optical pulse compression via an integrated nonlinear chirper;Optics Express;2010-03-29
2. Propagation losses of silicon nitride waveguides in the near-infrared range;Applied Physics Letters;2005-03-21
3. Comparison Among Various<tex>$hbox Si_3hboxN _4$</tex>Waveguide Geometries Grown Within a CMOS Fabrication Pilot Line;Journal of Lightwave Technology;2004-07
4. Fabrication and optical characterization of thin two-dimensional Si3N4 waveguides;Materials Science in Semiconductor Processing;2004-01
5. Direct laser writing of ridge optical waveguides in silica-titania glass sol-gel films;Optical Materials;1996-01
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