Watt-level deep-UV subnanosecond laser system based on Nd-doped fiber at 229 nm

Abstract

We report an efficient deep-UV master-oscillator power amplifier (MOPA) laser system at 229 nm that generates 350 ps pulses at 2 MHz repetition rate with an average power of 1.2 W. The use of a polarization-maintaining large mode area neodymium-doped fiber operating on the 4F3/2→4I9/2 transition allows high-power laser emission of up to 28 W near 915 nm in the sub-nanosecond regime with low spectral broadening. Two nonlinear frequency conversion stages (LBO + BBO crystals) in a single-pass configuration directly convert the IR laser emission to deep UV. This laser demonstrates the great potential of Nd3+-doped fiber lasers to produce high-power deep-UV emission.