DMD digital lithography optimization based on a hybrid genetic algorithm and improved exposure model

Author:

Huang Shengzhou1ORCID,Tang Yuanzhuo,Ren Bowen,Wu Dongjie,Pan Jiani,Tian Zhaowei,Jiang Chengwei,Li Zhi2,Huang Jinjin3

Affiliation:

1. Anhui East China Photoelectric Technology Study Institute

2. Hefei Acer Microelectronics Equipment Co., Ltd.

3. Wuhu Changpeng Auto Parts Co., LTD

Abstract

An efficient method to optimize digital micromirror device (DMD) lithography was proposed using a hybrid genetic algorithm integrated with an improved exposure model. The improved exposure model significantly refines traditional approaches by incorporating advanced parameters not previously considered, including the cross-transfer coefficient, detailed light source functions, and impulse response functions. These enhancements provide a comprehensive assessment of the entire optical imaging system’s impact on lithography quality and more accurately simulate the interactions of light with the photoresist. The hybrid method combines the robust optimization capabilities of genetic algorithms (GA) with this sophisticated exposure model, facilitating precise micromirror configurations and optimizing light distribution for specific lithographic patterns. This integration results in substantial improvements in lithographic precision, with improvements of up to 84% for hexagonal star patterns, 83% for arrow patterns, and 85% for embedded figure patterns. These advancements enhance imaging quality, reduce optical proximity distortions, and improve overall lithography performance, offering crucial insights into the precision and efficiency improvement of microelectronics fabrication processes.

Funder

National Natural Science Foundation of China

Anhui Provincial Key Research and Development Plan

Natural Science Foundation of Anhui Province

Major Project of Natural Science Study in Universities of Anhui Province

China Postdoctoral Science Foundation

Open Project of Special Display and Imaging Technology Innovation Center of Anhui Province

Research activities of postdoctoral researchers in Anhui Province

Anhui Province college young and middle-aged teachers training action project

Anhui Polytechnic University

New Era Education Quality Project

Publisher

Optica Publishing Group

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