Line laser scanning microscopy based on the Scheimpflug principle for high-resolution topography restoration and quantitative measurement

Abstract

A line laser scanning microscopy system with a larger depth of field based on the Scheimpflug principle is proposed for high-resolution surface topography restoration and quantitative measurement on miniature non-transparent samples. An imaging model based on the Scheimpflug principle is established, and a calibration method without system parameters is derived, which is further extended to a microscopic system. The measuring range of the system is 5mm×4mm×xmm, where x is the movement distance of the displacement stage. In the z-axis direction, the relative error of measurement is about 1% when z is of the millimeter level and less than 7% when z is of the micron level, and the spatial resolution is better than 3.8 µm. In the y-axis direction, the relative error of measurement is less than 5%. Finally, three-dimensional scanning of two samples with different surfaces is carried out to verify the feasibility of the system. The experimental results show that our system has the capability of high-resolution topography restoration and can be applied in industrial production scenarios such as automatic measurement and intelligent identification.