Affiliation:
1. Japan Aerospace Exploration Agency
Abstract
This paper presents a simple slit-mask-based sensing scheme that can be applied to a robust piston error sensor for segmented optical systems, even in space. Utilizing crossed fringes generated from multiple double-slit pairs, the sensor simultaneously detects multiple points in a segmented optical system in one shot. The experiments tested six pistons of a single-ring segmented mirror. The results showed measurement stability better than 15 nm in the range of 0–5 µm and absolute accuracy of
λ
/
20
. The theoretical perspective of applicability for larger piston measurement and N-ring segmented systems is also discussed, with simulation results for a two-ring system presented.
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering
Cited by
5 articles.
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