Efficiencies of master, replica, and multilayer gratings for the soft-x-ray-extreme-ultraviolet range: modeling based on the modified integral method and comparisons with measurements-Reference-Cited by-同舟云学术

Efficiencies of master, replica, and multilayer gratings for the soft-x-ray-extreme-ultraviolet range: modeling based on the modified integral method and comparisons with measurements

Published:2002-03-01 Issue:7 Volume:41 Page:1434
ISSN:0003-6935
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Goray Leonid I.,Seely John F.

Publisher

The Optical Society

Reference19 articles.

1. Polarization and efficiency of a concave multilayer grating in the 135–250-Å region and in normal-incidence and Seya–Namioka mounts

2. Multilayer-coated laminar grating with 16% normal-incidence efficiency in the 150-Å wavelength region

3. MoRu–Be multilayer-coated grating with 104% normal-incidence efficiency near the 114-nm wavelength

4. Comparison of the calculated and the measured efficiencies of a normal-incidence grating in the 125–225-Å wavelength range

5. Thin-film interference effects on the efficiency of a normal-incidence grating in the 100–350-Å wavelength region

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