Design and error calibration of an on-axis deflectometric microscope system

Abstract

An on-axis deflectometric microscope system (ODMS) is proposed for the microscopic surface measurement with high accuracy and a large slope dynamic range. To reduce the geometry sensitivity, a beam splitter is employed to build the coaxial configuration among the illumination screen, camera, and tested sample, which facilitates the calibration of system geometrical parameters. Due to the small working distance, the system model miscalibration in the model-ray-tracing-based “null” testing could cause obvious geometrical aberrations. In this paper, the geometrical aberrations due to the system model miscalibration are analyzed, and the corresponding calibration method based on computer-aided reverse optimization is applied to achieve accurate measurement. In addition, the systematic error introduced by the system components in the ODMS are also discussed. Both the simulation and experiment have been carried out to demonstrate the feasibility and high accuracy of the proposed measurement method. The proposed system is compact in structure, large in measurable slope range, and high in spatial resolution, providing a viable metrological tool for the microscopic testing of various freeform surfaces, microstructural elements, and micro-devices.