Funder
Guangzhou Science and Technology Program key projects
Natural Science Foundation of Guangdong Province
Subject
Atomic and Molecular Physics, and Optics
Cited by
13 articles.
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1. 先进计算光刻;Laser & Optoelectronics Progress;2022
2. 计算光刻研究及进展;Laser & Optoelectronics Progress;2022
3. Fast implicit active contour model for inverse lithography;Optics Express;2021-03-16
4. 基于半隐式离散化的局部水平集掩模优化;Acta Optica Sinica;2021
5. Mask Optimization based on artificial desired pattern;2020 International Workshop on Advanced Patterning Solutions (IWAPS);2020-11-05