Single probe shear scanning method for on-machine measurement of an optical profile-Reference-Cited by-同舟云学术

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Single probe shear scanning method for on-machine measurement of an optical profile

Published:2020-05-18 Issue:15 Volume:59 Page:4718
ISSN:1559-128X
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Yin Ziqiang,Chai Ning,Wang Sujuan,Huang Guangcan,Lin Jian,Zhao Rongli

Funder

National Natural Science Foundation of China

Science and Technology Program of Guangzhou, China

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering

Reference16 articles.

1. The NANOMEFOS non-contact measurement machine for freeform optics

2. Coupled distance sensor systems for high-accuracy topography measurement: Accounting for scanning stage and systematic sensor errors

3. On-machine roundness measurement of cylindrical workpieces by the combined three-point method

4. Development of an optical probe for profile measurement of mirror surfaces

5. Multi-probe scanning system comprising three laser interferometers and one autocollimator for measuring flat bar mirror profile with nanometer accuracy

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1. Precision Measurement of Linear Profile Using Four-Probe Sequential Error Separation Method;International Journal of Precision Engineering and Manufacturing;2022-10-19

2. Diamond microscraping for the fabrication of a trimmed radial Fresnel array on a roller mold;Applied Optics;2022-10-03

3. Ultraprecision machining and on-machine measurement of the radial Fresnel lens structure array of a large-scale roller mold;Applied Optics;2022-07-27

4. Precision profile measurement of disc surface by error motion compensation;Measurement Science and Technology;2022-07-11

5. A virtual parallel two-point roundness error measurement system;Measurement Science and Technology;2021-08-20

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