Abstract
We demonstrate simultaneous figuring and surface finishing of glass using a femtosecond laser. For the first time, to the best of our knowledge, we have achieved deterministic material removal with nanometer precision and maintained sub-nanometer surface roughness without inducing any mid-spatial-frequency errors to the initial surface. A dynamic pulse propagation model is established to predict the interaction process, including plasma generation and surface temperature. The interactive modeling and the experiments enable the selection of a set of laser parameters to achieve controllable optical figuring and finishing. This demonstration shows the potential for using femtosecond lasers for advanced freeform optic forming, finishing, and reduction of detrimental mid-spatial-frequency errors, and laser-ablation-based patterning used for fabrication of integrated photonics and lasers.
Funder
National Science Foundation
Subject
Atomic and Molecular Physics, and Optics
Cited by
7 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献