High-quality high-throughput silicon laser milling using a 1 kW sub-picosecond laser
Author:
Funder
H2020 Industrial Leadership
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics
Reference20 articles.
1. Ultrafast lasers—reliable tools for advanced materials processing
2. Laser micromachining for manufacturing MEMS devices
3. Terahertz multilevel phase Fresnel lenses fabricated by laser patterning of silicon
4. Silicon kinoform cylindrical lens with low surface roughness for high-power terahertz radiation
5. Laser-Ablated Silicon in the Frequency Range From 0.1 to 4.7 THz
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2. A composite strategy for high-quality and high-efficiency milling of alumina ceramic via femtosecond laser burst-mode;The International Journal of Advanced Manufacturing Technology;2023-01-30
3. A composite strategy for high-quality and high-efficiency milling of alumina ceramic via femtosecond laser burst-mode;2022-09-29
4. Beam Shaping for Uniform and Energy-efficient Surface Structuring of Metals with Ultrashort Laser Pulses in the mJ Range;Journal of Laser Micro/Nanoengineering;2022-07
5. Optimization strategy for high-quality laser milling of silicon;Optics & Laser Technology;2022-06
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