Absolute surface metrology by rotational averaging in oblique incidence interferometry-Reference-Cited by-同舟云学术

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Absolute surface metrology by rotational averaging in oblique incidence interferometry

Published:2014-05-22 Issue:16 Volume:53 Page:3370
ISSN:1559-128X
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Lin Weihao,He Yumei,Song Li,Luo Hongxin,Wang Jie

Funder

Major Program for the Fundamental Research of the Chinese Academy of Sciences

National Natural Science Foundation of China (NSFC)

Publisher

The Optical Society

Subject

Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering

Reference35 articles.

1. Future metrology needs for synchrotron radiation grazing-incidence optics

2. Optimal use of pentaprisms in highly accurate deflectometric scanning

3. Measurement of a $2 - meter$ flat using a pentaprism scanning system

4. Analysis of a scanning pentaprism system for measurements of large flat mirrors

5. Deflectometric systems for absolute flatness measurements at PTB

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Improving the accuracy of interferometer testing with absolute surface calibration and power spectral density analysis;Optics and Lasers in Engineering;2024-10

2. Surface measurements in oblique incidence for multiple elements piezoelectric x-ray bimorph mirror;AOPC 2023: Optic Fiber Gyro;2023-12-18

3. Absolute Measurement of Rectangular Flat Mirrors Using a Unidirectional Multi-Shifted Method;LASER OPTOELECTRON P;2023

4. Review of optical measurement techniques for measuring three-dimensional topography of inner-wall-shaped parts;Measurement;2022-10

5. Multiposition Rotation Interference Absolute Measurement Method for High-Precision Optical Component Surfaces;International Journal of Optics;2021-09-14

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