Author:
Wang Chong,Han Yanjun,Zhang Haiyang,Liu Chenlong,Jiang Liang,Qian Linmao
Abstract
Mid-spatial-frequency (MSF) errors seriously damages the imaging performance of optical components. Path pattern is an important factor that affects the generation of MSF waviness in polishing. This paper proposes a versatile pseudo random tree-shaped path (RTSP) generation method imitating the growth rules of tree branch in nature, which can efficiently generate continuous, uniformly distributed and multi-directional paths on a specified surface. Furthermore, the effectiveness of RTSP to suppress MSF waviness is verified by numerical simulation and experimental results. Finally, the RTSP is applied to the polishing of Ti-6Al-4V titanium alloy mirror. Results indicate that grinding marks have been significantly removed, while no obvious MSF waviness is introduced.
Funder
National Natural Science Foundation of China
Natural Science Foundation of Sichuan Province
China Postdoctoral Science Foundation
Fundamental Research Funds for the Central Universities
Subject
Atomic and Molecular Physics, and Optics
Cited by
14 articles.
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