Step-like beam scanning in a slow-light grating beam scanner for a FMCW LIDAR

Abstract

We have developed a nonmechanical beam scanner equipped with a Si photonics slow-light grating toward an on-chip frequency-modulated continuous-wave light detection and ranging (FMCW LIDAR) device. An optical beam is scanned thermo-optically, but it is also shifted sensitively to the frequency modulation, which is inconvenient for FMCW LIDAR. In this study, we canceled this shift and obtained step-like beam scanning with synchronized thermo-optic signals, which was confirmed in space–time-domain beam observations. The step-like scanning allows finer angular resolution of the range profile.