Chromatic confocal displacement sensing at oblique incidence angles
Author:
Publisher
The Optical Society
Subject
Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering
Reference11 articles.
1. Three-dimensional image sensing by chromatic confocal microscopy
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4. Analysis of method for measuring thickness of plane-parallel plates and lenses using chromatic confocal sensor
5. Method of thickness measurement for transparent specimens with chromatic confocal microscopy
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