Affiliation:
1. University of Electronic Science and Technology of China
2. Hebei Semiconductor Research Institute
3. Zhangjiang Laboratory
Abstract
Achieving ultra-precise wide-range terahertz (THz) phase modulation has been a long-standing challenge due to the short wavelength and sensitive phase of THz waves. This paper proposes a new ultra-high precision phase control method employing a digitally coding needle meta-chip embedded in a waveguide. The needle tips can effectively couple THz waves via the charge aggregation effect. By controlling the Schottky diodes with coding voltages, the charge on each meta-structure part can be tuned to form strong or weak resonances, producing phase shifts. Crucially, the massive charge accumulation and the sub-λ/10 distance between needle tips lead to near-field coupling among multiple tips. Therefore, modulation of the charge at each tip by multichannel coding voltages enables combined resonance tuning of THz waves, yielding a nonlinear phase superposition. Here, a meta-chip containing 8 needle meta-structure units is demonstrated, which breaks through the precision limitation of independent units and realizes super-resolution precision phase modulation similar to super-resolution imaging. In the 213–227 GHz band, we achieve a phase shift exceeding 180° with 11.25° accuracy, and a phase shift of over 170° with an accuracy of 3°. This super-resolution phase modulation strategy provides a new idea for future high-precision applications of THz integrated systems.
Funder
National Natural Science Foundation of China
National Key Research and Development Program of China
Sichuan Province Science and Technology Support Program
Fundamental Research Funds for the Central Universities
“Pioneer” and “Leading Goose” R&D Program of Zhejiang