Optical proximity correction by using unsupervised learning and the patch loss function: publisher’s note-Reference-Cited by-同舟云学术

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Optical proximity correction by using unsupervised learning and the patch loss function: publisher’s note

Published:2023-11-09 Issue:32 Volume:62 Page:8702
ISSN:1559-128X
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Yuan Pengpeng¹,Xu Peng,Ma Le¹,Wei Yayi¹

Affiliation:

1. University of Chinese Academy of Sciences

Abstract

This publisher’s note contains corrections to Appl. Opt. 61, 3924 (2022)APOPAI0003-6935

10.1364/AO.454357

Publisher

Optica Publishing Group

Subject

Atomic and Molecular Physics, and Optics,Engineering (miscellaneous),Electrical and Electronic Engineering

Reference1 articles.

1. Optical proximity correction by using unsupervised learning and the patch loss function

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