Measurement of roughness properties of diamond-turned metal surfaces using light-scattering method
Author:
Publisher
The Optical Society
Subject
Computer Vision and Pattern Recognition,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference10 articles.
1. Measurement of the rms roughness, autocovariance function and other statistical properties of optical surfaces using a FECO scanning interferometer
2. Optical estimation of statistics of surface roughness from light scattering measurements
3. Optical techniques for on-line measurement of surface topography
4. Residual surface roughness of diamond-turned optics
5. Measurement of the Finish of Diamond-Turned Metal Surfaces By Differential Light Scattering
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