Fluoride antireflection coatings for deep ultraviolet optics deposited by ion-beam sputtering
Author:
Publisher
The Optical Society
Reference8 articles.
1. Development of High-Reflection Mirrors of Fluoride Multilayers for F2Excimer Laser by Ion Beam Sputtering Method
2. Water immersion optical lithography for 45-nm node
3. Immersion lithography; its potential performance and issues
4. Ultraviolet optical and microstructural properties of MgF_2 and LaF_3 coatings deposited by ion-beam sputtering and boat and electron-beam evaporation
5. Film structure and optical constants of magnetron-sputtered fluoride films for deep ultraviolet lithography
Cited by 56 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Enhancing solar cell productivity with MgAl2O4–ZnAl2O4 blended anti-reflection coatings;Surfaces and Interfaces;2024-10
2. High performance La1-xAlxF3 nanocomposite coatings prepared by a co-evaporation technique;Optics Express;2024-06-03
3. Unveiling the effects of the surface and in-depth nanostructure on the far-UV optical reflectance of thin fluoride multilayer coatings;Applied Surface Science;2023-12
4. Hollow core-shell nanocoatings with gradient refractive index structure for enhanced photovoltaic performance;Colloids and Surfaces A: Physicochemical and Engineering Aspects;2023-06
5. Wide-angle deep ultraviolet antireflective multilayers via discrete-to-continuous optimization;Nanophotonics;2023-03-27
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3