High performance thin-film lithium niobate MZ modulator ready for massive production-Reference-Cited by-同舟云学术

High performance thin-film lithium niobate MZ modulator ready for massive production

Published:2022 Issue: Volume: Page:
ISSN:
Container-title:Optical Fiber Communication Conference (OFC) 2022
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Author:

Li Heng,Chen Quanan,Liu Ye,Tang Yongqian,Lu Qiaoyin,Lu Mingzhi,Guo Weihua

Abstract

Through photolithography we fabricated high-performance thin-film lithium niobate modulators on full 4-inch wafers with low VπL, wide bandwidth and low insertion loss. The waveguide loss is one of the lowest among similar work.

Publisher

Optica Publishing Group

Reference6 articles.

1. Ultra-low loss photonic circuits in lithium niobate on insulator

2. Monolithic ultra-high-Q lithium niobate microring resonator

3. Nanophotonic lithium niobate electro-optic modulators

4. Low-loss waveguides on Y-cut thin film lithium niobate: towards acousto-optic applications

5. Athermal lithium niobate microresonator

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