Flexible wafer-scale bifunctional metasurface based on nanoimprinting

Abstract

Metasurfaces have demonstrated remarkable capabilities in manipulating light fields across diverse applications. However, current research tends to examine these functionalities in isolation, prompting a growing interest in integrating different functionalities within a singular metasurface device. In this paper, we propose and experimentally demonstrate a bifunctional metasurface capable of providing concealment and sensing functions simultaneously. Specifically, the proposed nanostructure effectively operates as a one-way mirror, exhibiting an average reflection rate of approximately 90% under external illumination, alongside an absorption rate of 87.9% from the opposite direction of incidence. This functionality renders it suitable for privacy-enhancing building windows. Meanwhile, this nanostructure also integrates liquid sensing capabilities boasting a sensitivity of 464 nm/RIU, which is particularly valuable for monitoring liquid-based corrosion. The experimental performance of the prepared 6-inch nanohole-patterned metasurface closely aligns with the simulations, and the utilization of flexible polyethylene terephthalate (PET) film, coupled with nanoimprint lithography technology, enables a direct and cost-effective manufacturing process that can be scaled up for widespread applications.