High-Efficiency Si3N4 Grating Coupler with Bottom Bragg Reflector for Micro-Transfer Printed InP Photodiodes-Reference-Cited by-同舟云学术

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High-Efficiency Si3N4 Grating Coupler with Bottom Bragg Reflector for Micro-Transfer Printed InP Photodiodes

Published:2023 Issue: Volume: Page:
ISSN:
Container-title:Frontiers in Optics + Laser Science 2023 (FiO, LS)
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Author:

Bogaert Laurens,Roelkens Gunther

Abstract

We present FDTD simulation results and a corner analysis for the design of Si3N4 grating couplers with embedded amorphous-Si/SiO2 DBR bottom mirror providing up to 99.58% coupling efficiency at 1560nm to micro-transfer printed InP photodiodes.

Publisher

Optica Publishing Group

Reference7 articles.

1. Open-Access Silicon Photonics: Current Status and Emerging Initiatives

2. Silicon Nitride in Silicon Photonics

3. Micro-Transfer Printing for Heterogeneous Si Photonic Integrated Circuits

4. Efficient silicon nitride grating coupler with distributed Bragg reflectors

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