Author:
Tanguy Quentin A. A.,Hussein Hussein,Colburn Shane,Huang Luocheng,Böhringer Karl,Majumdar Arka
Abstract
We report a MEMS-based spatial light modulator which consists of an electrothermally actuated varifocal metasurface. The focal length spans over 40 µm for less than 10 V and presents a high compactness and simplicity of fabrication.