Author:
Varri Akhil,Brückerhoff-Plückelmann Frank,Taheriniya Shabna,Bernhardt Daniel,Richter Torsten,Wilde Gerhard,Pernice Wolfra H.
Abstract
We present a novel approach for scalable, permanent trimming of silicon nitride ring resonators with Si ion implantation. Using this approach, we tune ring resonators in a low-loss photonic crossbar array for matrix-vector multiplications.