High-throughput testing of the nanophotonic devices

Abstract

The proposed Resonance Scattering Spectroscopy (RSS) technique is fully automated, non-invasive, and high throughput wafer scale characterization system. In the RSS technique, a laser broadband light source of fixed polarisation is tightly focused on the device under test. Light with a wavelength matching that of the device’s resonance wavelength is scattered into the orthogonal polarisation giving a signal that is characteristic of the resonator which can be rapidly acquired. Using this prototype, several Photonic Crystal L3 cavities have been studied and we achieved a Q-factor of the order of tens of thousands for an optimised L3 cavity, which compares well with the design and simulation results.