Experimental study of a shearing interferometer concept for at-wavelength characterization of extreme-ultraviolet optics
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Publisher
The Optical Society
Reference9 articles.
1. Extreme ultraviolet lithography
2. Initial results from an extreme ultraviolet interferometer operating with a compact laser plasma source
3. Single sideband Ronchi test
4. Double Frequency Grating Lateral Shear Interferometer
5. Phase-measuring interferometry using extreme ultraviolet radiation
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3. Grating Lateral Shearing Interferometry for Suppressing Zero-Order Crosstalk;Chinese Journal of Lasers;2018
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