General measurement of optical system aberrations with a continuously variable lateral shear ratio by a randomly encoded hybrid grating-Reference-Cited by-同舟云学术

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General measurement of optical system aberrations with a continuously variable lateral shear ratio by a randomly encoded hybrid grating

Published:2015-10-15 Issue:30 Volume:54 Page:8913
ISSN:0003-6935
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Ling Tong,Yang Yongying,Liu Dong,Yue Xiumei,Jiang Jiabin,Bai Jian,Shen Yibing

Funder

Aviation Science Funds

National Natural Science Foundation of China (NSFC)

State Key Lab of MOI Innovation Program

Publisher

The Optical Society

Reference20 articles.

1. Recent progress of EUV wavefront metrology in EUVA

2. EUV wavefront metrology system in EUVA

3. Comparison of EUV interferometry methods in EUVA project

4. Development of an experimental EUV interferometer for benchmarking several EUV wavefront metrology schemes

5. Extreme ultraviolet carrier-frequency shearing interferometry of a lithographic four-mirror optical system

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1. Quantitative analysis of the contrast modulation for multilateral shearing interferometers;Optics Express;2024-08-23

2. Wavefront Reconstruction Based on Multi-directional Orthogonal Lateral Shearing Interferometry;2024-08-22

3. Error correction analysis of wavefront testing in quadriwave lateral shearing interferometry;Journal of the Optical Society of America A;2024-07-17

4. Wavefront restoration from lateral shearing data using spectral interpolation;Applied Optics;2023-10-02

5. Quadriwave lateral shearing interferometry based on double birefringent crystals of beam displacer;Applied Optics;2023-01-13

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