Extended x-ray absorption fine structure measurements on asymmetric bipolar pulse direct current magnetron sputtered Ta_2O_5 thin films
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Publisher
The Optical Society
Reference22 articles.
1. Tantalum pentoxide for advanced DRAM applications
2. Antireflecting coating from Ta2O5 and SiO2 multilayer films
3. Effects of substrate temperature on properties of pulsed dc reactively sputtered tantalum oxide films
4. Structural and electrical properties of Ta2O5 thin films deposited on Si from Ta(OC2H5)5 precursor
5. Structure and optical analysis of Ta2O5 deposited on infrasil substrate
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