Characterization of polarizer made of the deep-UV birefringent crystal Ba_2Mg(B_3O_6)_2
Author:
Funder
National Natural Science Foundation of China (NSFC)
National Instrumentation Program
Publisher
The Optical Society
Reference22 articles.
1. Polarimetry of illumination for 193nm immersion lithography
2. Polarization-selective subwavelength grating used with 193nm light
3. Photodissociation of Propargyl Chloride at 193 nm
4. Photodissociation dynamics of ClN3 at 193nm
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